A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope
Deng Xiao, Dai Gaoliang, Liu Jie, et al, Ultramicroscopy, 2021,226.
DOI： 10.1016/j.ultramic.2021.113293
Related Articleshttps://doi.org/10.1016/j.ultramic.2021.113293